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EKU - DEPARTMENT OF CHEMISTRY
ERINC
Morehead RF Micro Characterization Lab
Murray State Microelectronics Lab
Sullivan University College of Pharmacy
UK Catalyst Research and Testing Center
UK's Center for Advanced Materials (CAM)
UK Center for Applied Energy Research (CAER)
UK Ctr for Nanoscale Science & Engineering (CeNSE)
UK Electron Microscopy Center (EMC)
UK Imaging Facility
UK Mass Spectrometry Facility
UofL Conn Center for Renewable Energy Research
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UofL Wireless & IC Design Laboratory
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EKU - DEPARTMENT OF CHEMISTRY
ERINC
Morehead RF Micro Characterization Lab
Murray State Microelectronics Lab
Sullivan University College of Pharmacy
UK Catalyst Research and Testing Center
UK's Center for Advanced Materials (CAM)
UK Center for Applied Energy Research (CAER)
UK Ctr for Nanoscale Science & Engineering (CeNSE)
UK Electron Microscopy Center (EMC)
UK Imaging Facility
UK Mass Spectrometry Facility
UofL Conn Center for Renewable Energy Research
UofL Micro-Nano Technology Center (MNTC)
UofL Rapid Prototyping Center (RPC)
UofL Wireless & IC Design Laboratory
WKU Nondestructive Analysis (NOVA) Center
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KyNN Library - Recommend Reading
Introduction to Microelectronic Fabrication: Volume 5 of Modular Series on Solid State Devices (2nd Edition)
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Semiconductor Devices: Physics and Technology, 2nd Edition
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Quantum Transport: Atom to Transistor by Supriyo Datta B01_0410
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The Science and Engineering of Microelectronic Fabrication
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An Introduction to Microelectromechanical Systems Engineering, Second Edition
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Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography (SPIE Press Monograph Vol. PM39)
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Handbook of Microlithography, Micromachining, and Microfabrication. Volume 2: Micromachining and Microfabrication (SPIE PRESS Monograph Vol. PM40) (Spie Press Monograph, Pm39-Pm40)
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Micromechanics and MEMS: Classic and Seminal Papers to 1990
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Semiconductor Integrated Circuit Processing Technology (Addison Wesley Series in Electrical and Computer Engineering)
by W. R. Runyan, K. E. Bean
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Silicon Processing for the VLSI Era, Vol. 1: Process Technology
by Stanley Wolf, Richard N. Tauber
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Modern semiconductor fabrication technology
by Peter E Gise
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Microchip Fabrication, 5th Ed.
by Peter Van Zant
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Mechanical Design of Microresonators: Modeling and Applications (McGraw-Hill Nanoscience and Technology)
by Nicolae Lobontiu
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Practical MEMS: Design of microsystems, accelerometers, gyroscopes, RF MEMS, optical MEMS, and microfluidic systems
by Ville Kaajakari
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Copyright © 2009, Ky NanoNET. All rights reserved. This material is based upon work supported by the National Science Foundation under Grant No. 0814194. Any opinions, findings, and conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.