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Entries in Standard Operating Procedure (1)

Wednesday
Jun092010

Hogen S10 Standard Operating Procedure

This video covers the standard operating procedure for the Proton Energy Systems, Hogen S10 Hydrogen Generator.

This system is capable of producing 5 SLPM at 200 psi of high purity H2. The system is used to supply process hydrogen to an Oxford PECVD system and other smaller tools at the UofL Micro/Nano Technology Center.