Hogen S10 Standard Operating Procedure

This video covers the standard operating procedure for the Proton Energy Systems, Hogen S10 Hydrogen Generator.

This system is capable of producing 5 SLPM at 200 psi of high purity H2. The system is used to supply process hydrogen to an Oxford PECVD system and other smaller tools at the UofL Micro/Nano Technology Center.

Hogen S10 Theory of Operation

This video covers the theory of operation for the Proton Energy Systems, Hogen S10 Hydrogen Generator.

This system is capable of producing 5 SLPM at 200 psi of high purity H2. The system is used to supply process hydrogen to an Oxford PECVD system and other smaller tools at the UofL Micro/Nano Technology Center.