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« Hogen S10 Standard Operating Procedure | Main
Wednesday
Jun092010

Hogen S10 Theory of Operation

 

This video covers the theory of operation for the Proton Energy Systems, Hogen S10 Hydrogen Generator.

This system is capable of producing 5 SLPM at 200 psi of high purity H2. The system is used to supply process hydrogen to an Oxford PECVD system and other smaller tools at the UofL Micro/Nano Technology Center.

 

 

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