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KyNN - Fab Junkie Notebook > Sputtering pressure

Hi Everyone,

I am having a problem with DC magnetron pressures. We used to do depositions at 20-40mtorr and now it takes 80mtorr to run. There has also been a drop in permitted power which we can use. I have done some tests, evaluating the current and voltage from the power supply and feel that it has to do with the magnitron gun configuration. I even pulled the cooling water lines. comments welcome

Mark

May 14, 2009 | Unregistered CommenterMark

Any word on when the new sputter head will arrive?

May 19, 2009 | Registered CommenterKentucky Nanonet

This is a great article, Thanks for giving me this information. Keep posting ..

April 1, 2014 | Unregistered CommenterJohnny