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KyNN - Fab Junkie Notebook > Sputtering pressure

Hi Everyone,

I am having a problem with DC magnetron pressures. We used to do depositions at 20-40mtorr and now it takes 80mtorr to run. There has also been a drop in permitted power which we can use. I have done some tests, evaluating the current and voltage from the power supply and feel that it has to do with the magnitron gun configuration. I even pulled the cooling water lines. comments welcome

Mark

May 14, 2009 |

Mark

Any word on when the new sputter head will arrive?

May 19, 2009 |

Kentucky Nanonet

This is a great article, Thanks for giving me this information. Keep posting ..

April 1, 2014 |

Johnny

Copyright © 2012, Ky NanoNET. All rights reserved. This material is based upon work supported by the National Science Foundation under Grant No. 0814194. Any opinions, findings, and conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.