I am having a problem with DC magnetron pressures. We used to do depositions at 20-40mtorr and now it takes 80mtorr to run. There has also been a drop in permitted power which we can use. I have done some tests, evaluating the current and voltage from the power supply and feel that it has to do with the magnitron gun configuration. I even pulled the cooling water lines. comments welcome
Hi Everyone,
I am having a problem with DC magnetron pressures. We used to do depositions at 20-40mtorr and now it takes 80mtorr to run. There has also been a drop in permitted power which we can use. I have done some tests, evaluating the current and voltage from the power supply and feel that it has to do with the magnitron gun configuration. I even pulled the cooling water lines. comments welcome
Mark