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KyNN - Fab Junkie Notebook > HD8820 spin process

Hd-8820

Cut the tip off disposable pipette.
Dispense approx 2 droppers full of resist onto wafer.

Sread 500 RPM 5 sec
Spin 1000-4000 RPM 30 sec

Soft bake at 123C for 3 mins.

1000 RPM provides approx 20 um thickness
4000 RPM yields approx 5 um thickness

February 23, 2010 | Registered CommenterKentucky Nanonet