Hd-8820
Cut the tip off disposable pipette.Dispense approx 2 droppers full of resist onto wafer.
Sread 500 RPM 5 secSpin 1000-4000 RPM 30 sec
Soft bake at 123C for 3 mins.
1000 RPM provides approx 20 um thickness4000 RPM yields approx 5 um thickness
Hd-8820
Cut the tip off disposable pipette.
Dispense approx 2 droppers full of resist onto wafer.
Sread 500 RPM 5 sec
Spin 1000-4000 RPM 30 sec
Soft bake at 123C for 3 mins.
1000 RPM provides approx 20 um thickness
4000 RPM yields approx 5 um thickness